Liquid lithium supply and regulation

ABSTRACT

Methods and systems for the production and delivery of lithium metal of high purity are provided herein. In one or more embodiments, method for flowing liquid lithium to a processing chamber is provided and includes flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, where the liquid lithium delivery module is fluidly coupled to the lithium refill container, and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber. The liquid lithium delivery module contains a lithium storage region operable to store liquid lithium and containing a fluid supply line fluidly coupling an outlet port of a liquid lithium storage tank, and a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.17/544,358, filed Dec. 7, 2021, which is a continuation of U.S.application Ser. No. 16/445,327, filed Jun. 19, 2019, and issued as U.S.Pat. No. 11,198,604, which claims benefit of U.S. Prov. Appl. No.62/692,225, filed Jun. 29, 2018, which are incorporated herein byreference in their entirety.

BACKGROUND Field

Implementations described herein generally relate to methods and systemsfor the production and delivery of lithium metal of high purity. Moreparticularly, the implementations described herein relate to methods andsystems for lithium metal purification, delivery and deposition.

Description of the Related Art

Printed electronics are increasing in importance as societal demand forflexible devices and various IoT (internet of things) applicationsincreases. For example, printing of circuits on flexible substrates canhelp in packaging of sensors. Rechargeable electrochemical devices arealso becoming increasingly essential for many fields of everyday life.High-capacity energy storage devices, such as super-capacitors andlithium metal containing batteries, are also used in a growing number ofapplications, including portable electronics, medical, transportation,grid-connected large energy storage, renewable energy storage, anduninterruptible power supply (UPS). However, despite the increaseddemand for lithium metal, lithium metal faces several device integrationchallenges.

Lithium is an alkali metal. Like the heavy element homologs of the firstmain group, lithium is characterized by a strong reactivity with avariety of substances. Lithium reacts violently with water, alcohols andother substances that contain protic hydrogen, often resulting inignition. Additionally, lithium is unstable in air and reacts withoxygen, nitrogen and carbon dioxide. Normally, lithium is handled underan inert gas atmosphere (noble gases such as argon) and the strongreactivity of lithium necessitates that other processing operations alsobe performed in an inert gas atmosphere. Pure liquid lithium isdifficult to obtain because of the strong reactivity of lithium. A“skin” tends to form on the liquid lithium when the liquid lithiumreacts with contaminants in the atmosphere. This skin prevents properflowing of the liquid lithium and tends to clog the lithium deliverysystem. As a result, lithium provides several challenges when it comesto delivery, processing, storage, and transportation.

Therefore, there is a need for methods and systems for the delivery anddeposition of lithium metal of high purity.

SUMMARY

Implementations described herein generally relate to method and systemsfor the production and delivery of lithium metal of high purity. Moreparticularly, the implementations described herein relate to methods andsystems for lithium metal purification, delivery and deposition. In atleast one aspect, a liquid lithium delivery system is provided. Theliquid lithium delivery system comprises a liquid lithium deliverymodule. The liquid lithium delivery system comprises a lithium storageregion operable to store the liquid lithium, a pumping region operableto move liquid lithium through the lithium delivery, and a flow controlregion. The pumping region comprises an electromagnetic pump operable tomove the liquid lithium using electromagnetism. The flow control regionoperable to control the flow of liquid lithium comprises one or morevalves operable to control the flow of the liquid lithium, wherein thepumping region is positioned downstream from the lithium storage regionand upstream from the flow control region.

In at least one aspect, a liquid lithium delivery system is provided.The liquid lithium delivery system comprises a liquid lithium deliverymodule and a liquid lithium resupply module detachably and fluidlycoupled with the liquid lithium delivery module. The liquid lithiumdelivery module comprises a lithium storage region operable to store theliquid lithium, a pumping region operable to move liquid lithium throughthe lithium delivery module, and a flow control region operable tocontrol the flow of liquid lithium. The pumping region comprises anelectromagnetic pump operable to move the liquid lithium usingelectromagnetism. The flow control region comprises one or more valvesoperable to control the flow of the liquid lithium. The pumping regionis positioned downstream from the lithium storage region and upstreamfrom the flow control region. The liquid lithium resupply modulecomprises a liquid lithium resupply tank operable to supply liquidlithium to the liquid lithium delivery module and a first temperaturecontrol module, which is adapted to control the temperature of theliquid lithium resupply tank.

In at least one aspect, a liquid lithium delivery system is provided.The liquid lithium delivery system comprises a liquid lithium deliverymodule. The liquid lithium delivery module comprises a lithium storageregion operable to store liquid lithium and a pumping region operable tomove the liquid lithium through the liquid lithium delivery module. Thepumping region comprises an electromagnetic pump operable to move theliquid lithium using electromagnetism. The liquid lithium deliverymodule further comprises a flow control region operable to control aflow of the liquid lithium, comprising one or more valves operable tocontrol the flow of the liquid lithium, wherein the pumping region ispositioned downstream from the lithium storage region and upstream fromthe flow control region. The liquid lithium delivery system furthercomprises a liquid lithium resupply module detachably and fluidlycoupled with the liquid lithium delivery module. The liquid lithiumresupply module comprises a liquid lithium resupply tank operable tosupply liquid lithium to the liquid lithium delivery module and a firsttemperature control module, which is adapted to control a temperature ofthe liquid lithium resupply tank. The liquid lithium delivery systemfurther comprises a liquid lithium supply line that fluidly couples theliquid lithium resupply tank with the liquid lithium delivery module.The liquid lithium delivery system further comprises a filter assemblypositioned along the liquid lithium supply line operable to removeimpurities from the lithium liquid flowing through the liquid lithiumsupply line.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above-recited features of the presentdisclosure can be understood in detail, a more particular description ofthe implementations, briefly summarized above, may be had by referenceto implementations, some of which are illustrated in the appendeddrawings. It is to be noted, however, that the appended drawingsillustrate only typical implementations of this disclosure and aretherefore not to be considered limiting of its scope, for the disclosuremay admit to other equally effective implementations.

FIG. 1A illustrates a cross-sectional view of one implementation of anenergy storage device incorporating an anode electrode structure formedaccording to implementations described herein;

FIG. 1B illustrates a cross-sectional view of an anode electrodestructure formed according to implementations described herein;

FIG. 2 illustrates a schematic view of a lithium delivery systemaccording to implementations described herein; and

FIG. 3 illustrates a schematic view of an integrated processing toolincorporating a lithium delivery system according to implementationsdescribed herein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneimplementation may be beneficially incorporated in other implementationswithout further recitation.

DETAILED DESCRIPTION

The following disclosure describes methods and systems for theproduction, delivery, and deposition of lithium metal of high purity.Certain details are set forth in the following description and in FIGS.1A-3 to provide a thorough understanding of various implementations ofthe disclosure. Other details describing well-known structures andsystems often associated with lithium metal purification, deposition anddelivery are not set forth in the following disclosure to avoidunnecessarily obscuring the description of the various implementations.

Many of the details, dimensions, angles and other features shown in theFigures are merely illustrative of particular implementations.Accordingly, other implementations can have other details, components,dimensions, angles and features without departing from the spirit orscope of the present disclosure. In addition, further implementations ofthe disclosure can be practiced without several of the details describedbelow.

Implementations described herein may be used with a reel-to-reel coatingsystem, such as TopMet™, SmartWeb™, TopBeam™, all of which are availablefrom Applied Materials, Inc. of Santa Clara, Calif. Other tools andprocesses that use lithium metal of high purity may also be adapted tobenefit from the implementations described herein. The apparatusdescription described herein is illustrative and should not be construedor interpreted as limiting the scope of the implementations describedherein. It should also be understood that although some implementationsdescribed herein are shown with a reel-to-reel process, theimplementations described herein may also be performed on discretesubstrates.

Pure liquid lithium is difficult to obtain because of the highreactivity of lithium. A “skin” tends to form on the liquid lithium whenit reacts with contaminants in the atmosphere. This “skin” then preventsproper flowing of the liquid lithium. This “skin” is also difficult tofilter and tends to clog any flow regulation system that includes flowrestrictions. Previous solutions were to control the melting of solidlithium and filter the impurities generated. However, these previoussolutions suffered from several drawbacks. First, previous solutionseither lacked flow control or provided very inaccurate flow control.Second, these previous solutions suffered from temperature variations inthe melted lithium. Third, these previous solutions resulted in asignificant amount of impurities in the melted lithium, which increasedthe clogging of lines and valves as well as preventing the use ofsmaller flow orifices and nozzles.

Some implementations of the present disclosure provide access to highpurity liquid lithium with reduced contaminants, improved flow controland accuracy, and improved temperature stability. This reduction ofcontaminants provided by implementations of the present disclosureenables the use of small flow orifices and nozzles for improved coatingapplications.

In at least one aspect, liquid lithium is driven by an electromagneticpump. Flow is regulated by a matrix of flow orifices and a flow controlvalve, operated via PID feedback on an EM flowmeter.

In at least one aspect, the liquid lithium is kept in a pressure ratedcylinder. The dip tube feeding the pump takes the lithium in the middlesection of the cylinder. The top layer and the bottom layer of theliquid are contaminated, only the middle layer is used. The liquidlithium is refilled when X-percentage of the lithium has been used. X isbefore the contaminated top layer reaches the dip tube.

Printed electronics and energy storage devices, which are lithium-based,may benefit from the implementations described herein. Energy storagedevices, for example, batteries, typically include a positive electrode,a negative electrode separated by a porous separator and electrolyte,which is used as an ion-conductive matrix. Graphite anodes are thecurrent state of the art but the industry is moving from the graphitebased anode to silicon blended graphite anodes to increase cell energydensity. However, silicon blended graphite anodes often suffer fromirreversible capacity loss that occurs during the first cycle. Thus,there is a need for methods for replenishing this first cycle capacityloss. Deposition of lithium metal having high purity as described hereinis one such method for replenishing this first cycle capacity loss ofsilicon blended graphite anode. Additionally, the implementationsdescribed herein can be used to form lithium metal electrodes of highpurity.

FIG. 1A illustrates a cross-sectional view of one implementation of anenergy storage device 100 including a negative electrode structureincluding high purity lithium formed according to implementationsdescribed herein. The energy storage device 100 may be a lithium-ionenergy storage device that uses solid electrolytes (e.g., a solid-statebattery) as well as a lithium-ion energy storage device, which uses aliquid or polymer electrolyte. The energy storage device 100 has apositive (“cathode”) current collector 110, a positive electrodestructure 120 (i.e., cathode), a separator 130, a negative electrodestructure 140, and a negative (“anode”) current collector 150. In atleast one aspect, the negative electrode structure 140 is a lithiummetal electrode including high purity lithium formed according toimplementations described herein. In another implementation, at leastone of the positive electrode structure 120 and the negative electrodestructure 140, which may comprise graphite or silicon-graphite, arepre-lithiated with high purity lithium according to the implementationsdescribed herein. Note in FIG. 1A that the current collectors are shownto extend beyond the stack, although it is not necessary for the currentcollectors to extend beyond the stack, the portions extending beyond thestack may be used as tabs.

The current collectors 110, 150, on positive electrode structure 120 andnegative electrode structure 140, respectively, can be identical ordifferent electronic conductors. Examples of metals that the currentcollectors 110, 150 may be comprised of include aluminum (Al), copper(Cu), zinc (Zn), nickel (Ni), cobalt (Co), tin (Sn), silicon (Si),manganese (Mn), magnesium (Mg), alloys thereof, and combinationsthereof. In at least one aspect, at least one of the current collectors110, 150 is perforated. Furthermore, current collectors may be of anyform factor (e.g., metallic foil, sheet, or plate), shape andmicro/macro structure. Generally, in prismatic cells, tabs are formed ofthe same material as the current collector and may be formed duringfabrication of the stack, or added later.

The negative electrode structure 140 or anode may be any materialcompatible with the positive electrode structure 120. In at least oneaspect, the negative electrode structure 140 is a lithium metalelectrode including high purity lithium formed according toimplementations described herein. In another implementation, thenegative electrode structure is lithiated or pre-lithiated according tothe implementations described herein. The negative electrode structure140 may have an energy capacity greater than or equal to 372 mAh/g,preferably 700 mAh/g, and most preferably 1000 mAh/g. The negativeelectrode structure 140 may be constructed from a carbonaceous material(e.g., natural graphite or artificial graphite), lithium metal, lithiummetal alloys, silicon-containing graphite, silicon, nickel, copper, tin,indium, aluminum, silicon, oxides thereof, combinations thereof, or amixture of a lithium metal and/or lithium alloy and materials such ascarbon (e.g. coke, graphite), nickel, copper, tin, indium, aluminum,silicon, oxides thereof, or a combination thereof. In at least oneaspect, the negative electrode structure 140 comprises intercalationcompounds containing lithium or insertion compounds containing lithium.In at least one aspect, the negative electrode structure 140 is asilicon graphite anode. Suitable examples of carbonaceous materialsinclude natural and artificial graphite, partially graphitized oramorphous carbon, petroleum, coke, needle coke, and various mesophases.

The positive electrode structure 120 or cathode may be any materialcompatible with the anode and may include an intercalation compound, aninsertion compound, or an electrochemically active polymer. Suitableintercalation materials include, for example, lithium-containing metaloxides, MoS₂, FeS₂, MnO₂, TiS₂, NbSe₃, LiCoO₂, LiNiO₂, LiMnO₂, LiMn₂O₄,V₆O₁₃ and V₂O₅. Suitable polymers include, for example, polyacetylene,polypyrrole, polyaniline, and polythiophene. In at least one aspect, thepositive electrode structure 120 or cathode is composed of a layeredoxide, such as lithium cobalt oxide, an olivine, such as lithium ironphosphate, or a spinel, such as lithium manganese oxide. Exemplarylithium-containing oxides may be layered, such as lithium cobalt oxide(LiCoO₂), or mixed metal oxides, such as LiNi_(x)Co_(1-2x)MnO₂,LiNiMnCoO₂ (“NMC”), LiNi_(0.5)Mn_(1.5)O₄,Li(Ni_(0.8)Co_(0.15)Al_(0.05))O₂, LiMn₂O₄, and doped lithium richlayered-layered materials, wherein x is zero or a non-zero number.Exemplary phosphates may be iron olivine (LiFePO₄) and it is variants(such as LiFe(_(1-x))Mg_(x)PO₄), LiMoPO₄, LiCoPO₄, LiNiPO₄, Li₃V₂(PO₄)₃,LiVOPO₄, LiMP₂O₇, or LiFe_(1.5)P₂O₇, wherein x is zero or a non-zeronumber. Exemplary fluorophosphates may be LiVPO₄F, LiAlPO₄F,Li₅V(PO₄)₂F₂, Li₅Cr(PO₄)₂F₂, Li₂CoPO₄F, or Li₂NiPO₄F. Exemplarysilicates may be Li₂FeSiO₄, Li₂MnSiO₄, or Li₂VOSiO₄. An exemplarynon-lithium compound is Na₅V₂(PO₄)₂F₃.

In at least one aspect, the separator 130 is a porous polymericion-conducting polymeric substrate. In at least one aspect, the porouspolymeric substrate is a multi-layer polymeric substrate. In at leastone aspect, the separator 130 includes any commercially availablepolymeric microporous membranes (e.g., single or multi-ply), forexample, those products produced by Polypore (Celgard LLC., ofCharlotte, N.C.), Toray Tonen (Battery separator film (BSF)), SK Energy(lithium ion battery separator (LiBS), Evonik industries (SEPARION®ceramic separator membrane), Asahi Kasei (HiporeTM polyolefin flat filmmembrane), and DuPont (Energain®).

In at least one aspect, the separator 130 is a lithium-ion conductingmaterial. The lithium-ion conducting material may be a lithium-ionconducting ceramic or a lithium-ion conducting glass. The Li-ionconducting material may be comprised of one or more of LiPON, dopedvariants of either crystalline or amorphous phases of Li₇La₃Zr₂O₁₂,doped anti-perovskite compositions, Li₂S-P₂S₅, Li₁₀GeP₂S₁₂, and Li₃PS₄,lithium phosphate glasses, (1-x)LiI-x)Li₄SnS₄, xLiI-(₁-x)Li₄SnS₄, mixedsulfide and oxide electrolytes (crystalline LLZO, amorphous(1-x)LiI-(x)Li₄SnS₄ mixture, and amorphous xLiI-(1-x)Li₄SnS₄) forexample. In at least one aspect, x is between 0 and 1 (e.g., 0.1, 0.2,0.3, 0.4, 0.5, 0.6, 0.7, 0.8, and 0.9).

In at least one aspect, the electrolyte infused in cell components 120,130, and 140 can be comprised of a liquid/gel or a solid polymer and maybe different in each. In at least one aspect, the electrolyte primarilyincludes a salt and a medium (e.g., in a liquid electrolyte, the mediummay be referred to as a solvent; in a gel electrolyte, the medium may bea polymer matrix). The salt may be a lithium salt. The lithium salt mayinclude, for example, LiPF₆, LiAsF₆, LiCF₃SO₃, LiN(CF₃SO₃)₃, LiBF₆, andLiClO₄, BETTE electrolyte (commercially available from 3M Corp. ofMinneapolis, Minn.) and combinations thereof. Solvents may include, forexample, ethylene carbonate (EC), propylene carbonate (PC), EC/PC,2-MeTHF(2-methyltetrahydrofuran)/EC/PC, EC/DMC (dimethyl carbonate),EC/DME (dimethyl ethane), EC/DEC (diethyl carbonate), EC/EMC (ethylmethyl carbonate), EC/EMC/DMC/DEC, EC/EMC/DMC/DEC/PE, PC/DME, andDME/PC. Polymer matrices may include, for example, PVDF (polyvinylidenefluoride), PVDF:THF (PVDF:tetrahydrofuran), PVDF:CTFE (PVDF:chlorotrifluoroethylene) PAN (polyacrylonitrile), and PEO (polyethyleneoxide).

FIG. 1B illustrates a cross-sectional view of a dual-sided electrodestructure 170 that is pre-lithiated according to implementationsdescribed herein. The dual-sided electrode structure 170 comprises thenegative current collector 150 with a negative electrode structure 140a, 140 b formed on opposing sides of the negative current collector 150.

FIG. 2 illustrates a schematic view of a liquid lithium delivery system200 according to implementations described herein. The liquid lithiumdelivery system 200 is fluidly coupled with a processing chamber 202.The processing chamber 202 may be any chamber suitable for processingand depositing liquid lithium metal. Examples of suitable processingchambers include, but are not limited to, PVD systems, such as anelectron-beam evaporator, a thermal evaporation system, or a sputteringsystem, a thermal evaporation system, a thin film transfer system, aslot-die deposition system, a comma bar coating system, athree-dimensional printing system, or other suitable coating process.The liquid lithium delivery system 200 includes a liquid lithiumresupply module 204 and a lithium delivery module 206.

The liquid lithium resupply module 204 includes a liquid lithiumresupply tank 207 operable to supply liquid lithium to the lithiumdelivery module 206. The liquid lithium resupply tank 207 is detachablycoupled with the lithium delivery module 206. In at least one aspect,the liquid lithium resupply tank 207 is refillable. The liquid lithiumresupply tank 207 contains a supply of lithium 208. In at least oneaspect, the supply of lithium 208 is in liquid form. In at least oneaspect, the supply of lithium 208 is in solid form, which is heated toabove the melting point of lithium to form liquid lithium prior toentering the lithium delivery module 206. In at least one aspect, theliquid lithium resupply tank 207 is positioned on a temperature controlmodule 210, which is adapted to control the temperature of the liquidlithium resupply tank 207. For example, in at least one aspect wherelithium is supplied in solid form, the temperature control module 210comprises a temperature control device that applies heat to the solidlithium sufficient to melt the solid lithium. Any suitable temperaturecontrol device sufficient operable to control the temperature of theliquid lithium resupply tank 207 may be used in the temperature controlmodule 210. Examples of temperature control devices include heatexchangers, resistive heaters, temperature control jackets, orcombinations thereof. In at least one aspect, the liquid lithiumresupply tank 207 is covered by a temperature control jacket 212operable to control the temperature of the liquid lithium resupply tank207.

The liquid lithium resupply tank 207 typically includes a canister(e.g., cylinder or vessel) 214 having a sidewall 216, a top surface 218and a bottom surface 220 encompassing an interior volume 222 therein.The liquid lithium resupply tank 207 further includes an inlet port 224and an outlet port 226 in fluid communication with the interior volume222. The inlet port 224 is disposed through the lid or the top surface218 of the canister 214 and is operable to provide a gas to the interiorvolume 222 of the canister 214. The outlet port 226 is disposed throughthe lid or the top surface 218 of the canister 214 and is operable toallow liquid lithium to flow out of the canister 214 and into thelithium delivery module 206. In at least one aspect, the outlet port 226is fluidly coupled with a dip tube 227. In at least one aspect, the diptube 227 is positioned toward the middle portion of the supply oflithium 208 to avoid contaminants, which form on the top surface of thesupply of lithium 208 and the bottom of the lithium 208. In at least oneaspect, the inlet port 224 is fluidly coupled with an inert gas source228 operable to supply an inert gas to the interior volume 222 of thecanister 214. The flow of inert gas from the inert gas source 228 intothe interior volume 222 of the canister 214 may be controlled by one ormore check valves 230, 232. The check valves 230, 232 allow the inertgas to flow in one direction and block (“check”) fluid flowing in thereverse direction. The inert gas may be used to pressurize the canister214 and push the liquid lithium toward the lithium delivery module 206.

In at least one aspect, the canister 214 is certified by the Departmentof Transportation (DOT). For reasons of chemical compatibility andmechanical strength, the canister 214 is typically made of a stainlesssteel, such as 316 stainless steel (316 SST). The material of thecanister 214 should be fairly chemically inert since lithium his highlyreactive and easily contaminated. In at least one aspect, the materialof the canister 214 is cleaned and/or electropolished.

In the implementation of FIG. 2 , the liquid lithium resupply tank 207is fluidly coupled with the lithium delivery module via liquid lithiumsupply line 236. In at least one aspect, the liquid lithium supply line236 includes one or more shut-off valves 238, 242 operable to controlthe flow of liquid lithium into the lithium delivery module 206. In atleast one aspect, the liquid lithium supply line 236 further includes afirst filter assembly 244 operable to remove impurities from the streamof lithium liquid flowing through the liquid lithium supply line 236. Itshould be understood that although the first filter assembly 244 ispositioned in the liquid lithium resupply module 204, the filter mayalso be positioned in the lithium delivery module 206.

The first filter assembly 244 comprises any design and/or materialsuitable for removal of unwanted quantities of solid and gaseouscontaminants (e.g., lithium nitrides and lithium oxides) from the liquidlithium. In at least one aspect, the first filter assembly 244 includesa skimmer device operable to remove solid contaminants from the surfaceof the liquid lithium.

In at least one aspect, the first filter assembly 244 includes a metalmesh filter operable to remove solid contaminants from the liquidlithium. The metal mesh filter may comprise any material compatible withliquid lithium. In at least one aspect, the metal mesh is composed of amaterial selected form copper, aluminum, nickel, or combinationsthereof. In at least one aspect, the metal mesh filter is composed ofstainless steel (SST). In at least one aspect, the metal mesh filter iscomposed of copper, aluminum, nickel, stainless steel, or combinationsthereof. The dimensions of the metal mesh filter are typically selectedbased on the size of the contaminants to be filtered out of the lithiummetal. The metal mesh filter may have a wire diameter between about0.050 micrometers and about 200 micrometers. The metal mesh filter mayhave a wire diameter between about 50 micrometers and about 100micrometers. In at least one aspect, the metal mesh filter may have anopening between about 5 micrometers and about 200 micrometers. In atleast one aspect, the metal mesh filter may have an opening betweenabout 10 micrometers and about 100 micrometers. As used herein withreference to the metal mesh filter, the term “openings” refers to thedistance between two adjacent parallel wires.

In at least one aspect, the first filter assembly 244 includes a foamfilter operable to remove solid contaminants from the liquid lithium.The foam filter may comprise any material compatible with the liquidlithium. In at least one aspect, the foam mesh is composed of a materialselected form copper, copper-zinc, aluminum, nickel, stainless steel, orcombinations thereof. In at least one aspect, the foam filter iscomposed of reticulated foam material. The dimensions of the cells andporosity of the foam material is selected to remove the solidcontaminants from the liquid lithium while allowing the purified liquidlithium to flow through the foam material.

In at least one aspect, the lithium delivery module 206 includes ahousing 209 for enclosing the components of the lithium delivery module206. In at least one aspect, the housing 209 is a shippable containercertified by the DOT. The lithium delivery module 206 includes a lithiumstorage region 246 operable to store the liquid lithium and a flowcontrol region 250 operable to control the flow of liquid lithium to theprocessing chamber 202. In at least one aspect, the lithium deliverymodule 206 further includes an optional pumping region 248 operable tomove liquid lithium through the lithium delivery module 206. If present,the optional pumping region is positioned downstream from the lithiumstorage region 246 and upstream from the flow control region 250.

The lithium storage region 246 includes a liquid lithium storage tank252 operable to store liquid lithium. The liquid lithium storage tank252 typically contains a supply of liquid lithium 253. In at least oneaspect, the liquid lithium storage tank 252 is positioned on atemperature control module 254, which is adapted to control thetemperature of the liquid lithium storage tank 252. Any suitabletemperature control device may be used in the temperature control module254. The temperature control module 254 is typically set to atemperature above the melting point of lithium, sufficient to maintainthe liquid lithium in liquid phase. Examples of temperature controldevices include heat exchangers, resistive heaters, temperature controljackets, or combinations thereof. In at least one aspect, the liquidlithium storage tank 252 is covered by a temperature control jacket 256operable to control the temperature of the liquid lithium storage tank252.

The liquid lithium storage tank 252 typically includes a canister (e.g.,cylinder or vessel) 258 having a sidewall 260, a top surface 262 and abottom surface 264 encompassing an interior volume 266 therein. Theliquid lithium resupply tank further includes a first inlet port 268, asecond inlet port 270 and an outlet port 272 in fluid communication withthe interior volume 266. The first inlet port 268 is disposed throughthe lid or the top surface 262 of the canister 258 and is operable toprovide liquid lithium to the interior volume 266 of the canister 258.The first inlet port 268 is fluidly coupled with the liquid lithiumsupply line 236 for receiving liquid lithium from the liquid lithiumresupply tank 207. The second inlet port 270 is disposed through the lidor the top surface 262 of the canister 258 and is operable to providegas to the interior volume 266 of the canister 258. The second inletport 270 is fluidly coupled with an inert gas source 274 operable tosupply an inert gas to the interior volume 266 of the canister 258. Theflow of inert gas from the inert gas source 274 into the interior volume266 of the canister 258 may be controlled by one or more check valves276, 278. The outlet port 272 is disposed through the lid or the topsurface 262 of the canister 258 and is operable to allow liquid lithiumto flow out of the canister 258 and into the pumping region 248. In atleast one aspect, the outlet port 272 is fluidly coupled with a dip tube273. In at least one aspect, the dip tube 273 is positioned toward themiddle portion of the supply of liquid lithium 253 to avoidcontaminants, which form on the top surface of the supply of liquidlithium 253 and the bottom of the supply of liquid lithium 253.

In at least one aspect, the canister 258 is certified by the Departmentof Transportation (DOT). For reasons of chemical compatibility andmechanical strength, the canister 258 is typically made of a stainlesssteel, such as 316 stainless steel (316 SST). The material of thecanister 258 should be fairly chemically inert since lithium his highlyreactive and easily contaminated.

A fluid supply line 280 couples the outlet port 272 with a conduit 282.In at least one aspect, a second filter assembly 284 is positioned alongthe fluid supply line 280. In at least one aspect, the second filterassembly 284 is similar to the first filter assembly 244. One or moreshut-off valves 286 may be positioned along the fluid supply line 280operable to control the flow of liquid lithium from the liquid lithiumstorage tank 252 through the fluid supply line 280 and into the pumpingregion 248. The pumping region 248 includes a pump 288 operable to movethe liquid lithium through the lithium delivery module 206. The pumpingregion 248 optionally includes a flow meter 290 operable to monitor theflow of liquid lithium through the pumping region 248. In at least oneaspect, the flow meter 290 is positioned downstream from the pump 288.The pump 288 may be any suitable pump operable to move liquid metal. Inat least one aspect, the pump 288 is an electromagnetic pump that movesliquid lithium using electromagnetism. The electromagnetic pump may bean electromagnetic pump of any type. In at least one aspect, theelectromagnetic pump causes an electromagnetic force to act on theliquid lithium by an induced current flowing through the liquid lithiumdue to a moving magnetic field generated by a direct or alternatingcurrent and the moving magnetic field, thus discharging the liquidlithium in the same direction as a moving direction of the magneticfield. The flow meter 290 may be any suitable flow meter for measuringthe flow of the liquid lithium. The flow meter 290 may communicate withthe pump 288 and/or shut-off valve 286 via a feedback loop (not shown).

The pump 288 in combination with the flow meter 290 provides a stablesystem with a feedback loop in terms of flow regulation.

In at least one aspect, the flow meter 290 is an electromagnetic flowmeter. The electromagnetic flowmeter typically includes a magnetapplying a magnetic field to the lithium metal fluid flowing through theduct line and an electrode detecting a current generated in the lithiummetal fluid due to a flow of the lithium metal fluid linked with themagnetic field, and measures an electromotive force by a magnetic fieldapplied in a direction orthogonal to a flow direction of the lithiummetal fluid and an electric field generated in a direction orthogonal toany of the magnetic field direction and the flow direction, thusmeasuring a flow amount.

In at least one aspect, the flow meter 290 is an ultrasonic flow meter.The ultrasonic flowmeter includes a transmitter and a receiver for anultrasonic wave in piping, calculates a flow rate of the lithium metalfluid from a time until a signal arrival using a characteristic of apropagation rate of the ultrasonic wave being related to a flow rate ofa fluid, and calculates a flow amount from a known section.

The flow control region 250 is fluidly coupled with the pumping region248 via fluid delivery line 291. The flow control region 250 typicallyincludes one or more valves 292 for delivering and controlling the flowof lithium liquid metal to the processing chamber 202. Although fourvalves 292 a-292 d are shown in FIG. 2 , any number of valves may beused. The valves 292 a-292 d may be a needle valve or the like, and isadjustable to set the flow of liquid lithium metal to the processingchamber 202. In at least one aspect, valve 292 a is a regulator valveand valves 292 b-292 d are needle valves.

The flow control region 250 is fluidly coupled with the processingchamber 202 via fluid delivery line 294. In at least one aspect, a thirdfilter assembly 296 is positioned along the fluid delivery line 294operable to remove any additional contaminants from the liquid lithiummetal. In at least one aspect, the third filter assembly 296 is similarto the first filter assembly 244. The liquid lithium delivery system 200may contain additional valves, pressure regulators, pressuretransducers, and pressure indicators, which are not described in detailfor the sake of brevity. In addition, the fluid delivery lines and fluidsupply lines shown may be heated to keep the liquid lithium in liquidphase.

In at least one aspect, the fluid delivery line 291 includes a feedbackloop 295 for delivering liquid lithium back to the fluid supply line280. In at least one aspect, the feedback loop 295 includes a checkvalve 297 operable to control the flow of liquid lithium through thefeedback loop 295. In at least one aspect, the feedback loop 295delivers the liquid lithium to the fluid supply line 280 before thesecond filter assembly 284 where additional contaminants are removedfrom the liquid lithium. In at least one aspect, the feedback loop 295delivers the liquid lithium to the liquid lithium storage tank 252.

FIG. 3 illustrates a schematic view of an integrated processing tool 300incorporating the liquid lithium delivery system 200 according toimplementations described herein. The integrated processing tool 300 maybe used to form an anode structure containing high purity lithium formedaccording to implementations described herein. In certainimplementations, the integrated processing tool 300 comprises one ormore processing modules or chambers 320 arranged in a line, eachoperable to perform one processing operation to a continuous sheet ofmaterial 310. In at least one aspect, the integrated processing tool 300is a web tool. In at least one aspect, the continuous sheet of material310 is a conductive substrate. In at least one aspect, the continuoussheet of material 310 is a flexible conductive substrate. In at leastone aspect, the continuous sheet of material 310 is an anode currentcollector, for example, the negative current collector 150. In anotherimplementation, the continuous sheet of material 310 is a currentlycollector with an electrode structure formed thereon, for example,dual-sided electrode structure 170. The integrated processing tool 300may comprise feed reel 312 and take-up reel 314 operable to move thecontinuous sheet of material 310 through the plurality of processingchamber or modules. In at least one aspect, the integrated processingtool 300 includes the processing chamber 320 for depositing a layer ofhigh purity lithium over the continuous sheet of material 310.

In certain implementations, the integrated processing tool 300 comprisesa transfer mechanism 305. The transfer mechanism 305 may comprise anytransfer mechanism capable of moving the continuous sheet of material310 through the processing region of the processing chamber 320. Thetransfer mechanism 305 may comprise common transport architecture. Thecommon transport architecture may comprise a reel-to-reel system withthe common take-up-reel 314 and the feed reel 312 for the system. Thetake-up reel 314 and the feed reel 312 may be individually heated. Thetake-up reel 314 and the feed reel 312 may be individually heated usingan internal heat source positioned within each reel or an external heatsource. The common transport architecture may further comprise one ormore intermediate transfer reels (not shown) positioned between thetake-up reel 314 and the feed reel 312.

Although the integrated processing tool 300 is depicted as havingdiscrete processing regions, in at least one aspect, the integratedprocessing tool 300 has a common processing region. In someimplementation, it may be advantageous to have separate or discreteprocessing regions, modules, or chambers for each process step. Forimplementations having discrete processing regions, modules, orchambers, the common transport architecture may be a reel-to-reel systemwhere each chamber or processing region has an individual take-up-reeland feed reel and one or more optional intermediate transfer reelspositioned between the take-up reel and the feed reel. The commontransport architecture may comprise a track system. The track systemextends through the processing regions or discrete processing regions.The track system is operable to transport either a web substrate ordiscrete substrates. In at least one aspect, the finished anodeelectrode will not be collected on take-up reel 314 as shown in thefigures, but may go directly for integration with the separator film andpositive electrodes, etc., to form battery cells.

Any suitable metal film deposition process for depositing low meltingtemperature metal may be used to deposit the high purity lithium film.The processing chamber 320 for depositing the lithium metal film mayinclude a three-dimensional printing system (e.g., a three-dimensionalscreen printing system), a PVD system, such as an electron-beamevaporator, a thermal evaporation system, or a sputtering system, a thinfilm transfer system, or a slot-die deposition system.

The integrated processing tool 300 further includes a system controller330 operable to control, among other things, the delivery of high puritylithium from the liquid lithium delivery system 200 to the processingchamber 320. The system controller 330 is adapted to control theposition and motion of the various components used to complete thetransferring process. The system controller 330 is generally designed tofacilitate the control and automation of the overall system andtypically includes a central processing unit (CPU) (not shown), memory(not shown), and support circuits (or I/O) (not shown). The CPU may beone of any form of computer processors that are used in industrialsettings operable to control various system functions, chamber processesand support hardware (e.g., detectors, robots, motors, fluid deliveryhardware, gas sources hardware, etc.) and monitor the system and chamberprocesses (e.g., chamber temperature, process sequence throughput,chamber process time, I/O signals, etc.). The memory is connected to theCPU, and may be one or more of a readily available memory, such asrandom access memory (RAM), read only memory (ROM), floppy disk, harddisk, or any other form of digital storage, local or remote. Softwareinstructions and data can be coded and stored within the memory forinstructing the CPU. The support circuits are also connected to the CPUfor supporting the processor in a conventional manner. The supportcircuits may include cache, power supplies, clock circuits, input/outputcircuitry, subsystems, and the like. A program (or computerinstructions) readable by the system controller 330 determines whichtasks are performable on a substrate. Preferably, the program issoftware readable by the system controller 330, which includes code toperform tasks relating to lithium delivery, monitoring, and execution ofthe processing sequence tasks and various chamber processes.

Implementations:

Clause 1. A liquid lithium delivery system, comprising a liquid lithiumdelivery module, comprising a lithium storage region operable to storethe liquid lithium, a pumping region operable to move liquid lithiumthrough the lithium delivery module, comprising an electromagnetic pumpoperable to move the liquid lithium using electromagnetism, and a flowcontrol region operable to control the flow of liquid lithium,comprising one or more valves operable to control the flow of the liquidlithium, wherein the pumping region is positioned downstream from thelithium storage region and upstream from the flow control region.

Clause 2. The delivery system of clause 1, wherein the lithium storageregion comprises a liquid lithium storage tank operable to store theliquid lithium and a temperature control module, which is adapted tocontrol the temperature of the liquid lithium storage tank.

Clause 3. The delivery system of clause 2, wherein the temperaturecontrol module comprises a heat exchanger, a resistive heater, atemperature control jacket, or combinations thereof.

Clause 4. The delivery system of and of clauses 1 to 3, wherein theliquid lithium storage tank comprises a canister having a sidewall, atop surface, a bottom surface, wherein the sidewall, the top surface andthe bottom surface define an interior volume, an inlet port disposedthrough the top surface of the canister and operable to provide an inertgas to the interior volume of the canister, and an outlet port disposedthrough the top surface of the canister and operable to allow liquidlithium to flow out of the canister.

Clause 5. The delivery system of any of clauses 1 to 4, wherein thepumping region comprises a flow meter operable to monitor the flow ofthe liquid lithium through the pumping region.

Clause 6. The delivery system of clause 5, wherein the flow meter ispositioned downstream from the pump.

Clause 7. The delivery system of any of clauses 1 to 6, furthercomprising a liquid lithium supply line that fluidly couples the liquidlithium storage tank with the pump and a filter assembly positionedalong the liquid lithium supply line operable to remove impurities fromthe stream of lithium liquid flowing through the liquid lithium supplyline.

Clause 8. The delivery system of clause 7, wherein the filter assemblycomprises a metal mesh filter operable to remove contaminants from theliquid lithium.

Clause 9. The delivery system of any of clauses 1 to 8, wherein the oneor more valves comprise a needle valve.

Clause 10. The delivery system of clause 9, wherein the one or morevalves further comprise a regulator valve.

Clause 11. The delivery system of any of clauses 1 to 10, furthercomprising a fluid delivery line that fluidly couples the flow controlregion with a processing chamber, and a filter assembly positioned alongthe fluid delivery line operable to remove impurities from the stream oflithium liquid flowing through the fluid delivery line.

Clause 12. A liquid lithium delivery system, comprising a liquid lithiumdelivery module, comprising a lithium storage region operable to storethe liquid lithium, a pumping region operable to move liquid lithiumthrough the lithium delivery module, comprising an electromagnetic pumpoperable to move the liquid lithium using electromagnetism and a flowcontrol region operable to control the flow of liquid lithium,comprising one or more valves operable to control the flow of the liquidlithium, wherein the pumping region is positioned downstream from thelithium storage region and upstream from the flow control region and aliquid lithium resupply module detachably and fluidly couple with theliquid lithium delivery module, comprising a liquid lithium resupplytank operable to supply liquid lithium to the liquid lithium deliverymodule, and a first temperature control module, which is adapted tocontrol the temperature of the liquid lithium resupply tank.

Clause 13. The delivery system of clause 12, wherein the firsttemperature control module comprises a heat exchanger, a resistiveheater, a temperature control jacket, or combinations thereof.

Clause 14. The delivery system of clause 12 or 13, wherein the liquidlithium resupply tank comprises a canister having a sidewall, a topsurface, and a bottom surface, wherein the sidewall, the top surface andthe bottom surface define an interior volume, an inlet port disposedthrough the top surface of the canister and operable to provide an inertgas to the interior volume of the canister, and an outlet port disposedthrough the top surface of the canister and operable to allow liquidlithium to flow out of the canister and into the liquid lithium deliverymodule.

Clause 15. The delivery system of clause 14, wherein the inlet port isfluidly coupled with an inert gas source.

Clause 16. The delivery system of any of clauses 12 to 15, furthercomprising a liquid lithium supply line that fluidly couples the liquidlithium resupply tank with the lithium delivery module, and a filterassembly positioned along the liquid lithium supply line operable toremove impurities from the stream of lithium liquid flowing through theliquid lithium resupply line.

Clause 17. The delivery system of clause 16, wherein the filter assemblycomprises a metal mesh filter operable to remove contaminants from theliquid lithium.

Clause 18. The delivery system of any of clauses 12 to 17, wherein thelithium storage region comprises a liquid lithium storage tank operableto store the liquid lithium, and a second temperature control module,which is adapted to control the temperature of the liquid lithiumstorage tank.

Clause 19. The delivery system of clause 18, wherein the secondtemperature control module comprises a heat exchanger, a resistiveheater, a temperature control jacket, or combinations thereof.

Clause 20. The delivery system of clause 18, wherein the liquid lithiumstorage tank comprises a canister having a sidewall, a top surface, anda bottom surface, wherein the sidewall, the top surface and the bottomsurface define an interior volume, an inlet port disposed through thetop surface of the canister and operable to provide an inert gas to theinterior volume of the canister, and an outlet port disposed through thetop surface of the canister and operable to allow liquid lithium to flowout of the canister.

Clause 21. The delivery system of any of clauses 12 to 20, wherein thepumping region comprises a flow meter operable to monitor the flow ofthe liquid lithium through the pumping region.

Clause 22. The delivery system of clause 21, wherein the flow meter ispositioned downstream from the electromagnetic pump.

Clause 23. The delivery system of any of clauses 12 to 22, furthercomprising a liquid lithium supply line that fluidly couples the liquidlithium storage tank with the pump, and a filter assembly positionedalong the liquid lithium supply line operable to remove impurities fromthe stream of lithium liquid flowing through the liquid lithium supplyline.

Clause 24. The delivery system of clause 23, wherein the filter assemblycomprises a metal mesh filter operable to remove contaminants from theliquid lithium.

Clause 25. The delivery system of any of clauses 12 to 24, wherein theone or more valves comprise a needle valve.

Clause 26. The delivery system of clause 25, wherein the one or morevalves further comprise a regulator valve.

Clause 27. The delivery system of any of clauses 12 to 25, furthercomprising a fluid delivery line that fluidly couples the flow controlregion with a processing chamber, and a filter assembly positioned alongthe fluid delivery line operable to remove impurities from the stream oflithium liquid flowing through the fluid delivery line.

Clause 28. A liquid lithium delivery system, comprising a liquid lithiumdelivery module, comprising a lithium storage region operable to storethe liquid lithium, a pumping region operable to move the liquid lithiumthrough the lithium delivery module, comprising an electromagnetic pumpoperable to move the liquid lithium using electromagnetism, and a flowcontrol region operable to control the flow of the liquid lithium,comprising one or more valves operable to control the flow of the liquidlithium, wherein the pumping region is positioned downstream from thelithium storage region and upstream from the flow control region, and aliquid lithium resupply module detachably and fluidly coupled with theliquid lithium delivery module, comprising a liquid lithium resupplytank operable to supply liquid lithium to the liquid lithium deliverymodule, and a first temperature control module, which is adapted tocontrol the temperature of the liquid lithium resupply tank, a liquidlithium supply line that fluidly couples the liquid lithium resupplytank with the lithium delivery module, and a filter assembly positionedalong the liquid lithium supply line operable to remove impurities fromthe lithium liquid flowing through the liquid lithium resupply line.

Clause 29. The delivery system of clause 28, wherein the filter assemblycomprises a metal mesh filter operable to remove contaminants from theliquid lithium.

Clause 30. The delivery system of clause 28 or 29, wherein the lithiumstorage region comprises a liquid lithium storage tank operable to storethe liquid lithium, and a second temperature control module, which isoperable to control the temperature of the liquid lithium storage tank.

Clause 31. The delivery system of any of clauses 28 to 30, wherein thesecond temperature control module comprises a heat exchanger, aresistive heater, a temperature control jacket, or a combinationthereof.

Clause 32. The delivery system of any of clauses 28 to 31, wherein theliquid lithium storage tank comprises a canister having a sidewall, atop surface, and a bottom surface, wherein the sidewall, the top surfaceand the bottom surface define an interior volume, an inlet port disposedthrough the top surface of the canister and operable to provide an inertgas to the interior volume of the canister, and an outlet port disposedthrough the top surface of the canister and operable to allow liquidlithium to flow out of the canister.

Clause 33. The delivery system of any of clauses 28 to 32, wherein thepumping region comprises a flow meter operable to monitor the flow ofthe liquid lithium through the pumping region.

Clause 34. The delivery system of any of clauses 28 to 33, wherein theflow meter is positioned downstream from the electromagnetic pump.

Clause 35. The delivery system of any of clauses 28 to 34, furthercomprising a liquid lithium supply line that fluidly couples the liquidlithium storage tank with the electromagnetic pump, and a filterassembly positioned along the liquid lithium supply line operable toremove impurities from the lithium liquid flowing through the liquidlithium supply line.

Clause 36. The delivery system of any of clauses 28 to 35, wherein thefilter assembly comprises a metal mesh filter operable to removecontaminants from the liquid lithium.

Clause 37. The delivery system of any of clauses 28 to 36, wherein theone or more valves comprise a needle valve.

Clause 38. The delivery system of any of clauses 28 to 37, wherein theone or more valves further comprise a regulator valve.

Clause 39. The delivery system of any of clauses 28 to 38, furthercomprising a fluid delivery line that fluidly couples the flow controlregion with a processing chamber, and a filter assembly positioned alongthe fluid delivery line operable to remove impurities from the lithiumliquid flowing through the fluid delivery line.

In summary, some benefits of implementations of the present disclosureinclude a liquid lithium delivery system that provides access to highpurity liquid lithium with reduced contaminants, improved flow controland accuracy, and improved temperature stability. This reduction ofcontaminants provided by implementations of the present disclosureenables the use of small flow orifices and nozzles for improved qualityin coating applications.

When introducing elements of the present disclosure or exemplary aspectsor implementation(s) thereof, the articles “a,” “an,” “the” and “said”are intended to mean that there are one or more of the elements.

The terms “comprising,” “including” and “having” are intended to beinclusive and mean that there may be additional elements other than thelisted elements.

While the foregoing is directed to implementations of the presentdisclosure, other and further implementations of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

1. A method for flowing liquid lithium to a processing chamber, comprising: flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container; and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber; wherein the liquid lithium delivery module comprises: a lithium storage region operable to store liquid lithium and comprises a liquid lithium storage tank having an outlet port; a fluid supply line fluidly coupling the outlet port of the liquid lithium storage tank; a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line; a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the flow control region is positioned downstream from the flow meter; and a fluid delivery line fluidly coupled downstream of the one or more valves and configured to be in fluid communication to the processing chamber.
 2. The method of claim 1, wherein the flow meter is an electromagnetic flow meter.
 3. The method of claim 1, wherein the flow meter is an ultrasonic flow meter.
 4. The method of claim 1, wherein the one or more valves comprises a regulator valve.
 5. The method of claim 1, wherein the one or more valves comprises a needle valve.
 6. The method of claim 1, further comprises removing impurities from the flow of the liquid lithium flowing through the fluid supply line with a filter assembly.
 7. The method of claim 6, wherein the filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.
 8. The method of claim 1, further comprising a filter assembly positioned along the fluid delivery line operable to remove impurities from the flow of the liquid lithium flowing through the fluid delivery line.
 9. The method of claim 8, wherein the filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.
 10. The method of claim 1, further comprising: a liquid lithium supply line fluidly coupled to and between the lithium refill container and the liquid lithium delivery module; and a filter assembly positioned along the liquid lithium supply line operable to remove impurities from the flow of the liquid lithium flowing through the liquid lithium supply line.
 11. The method of claim 10, wherein the filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.
 12. The method of claim 1, further comprising controlling a temperature of the liquid lithium storage tank with a temperature control module.
 13. The method of claim 12, wherein the lithium storage region comprises the temperature control module, and wherein the temperature control module comprises a heat exchanger, a resistive heater, a temperature control jacket, or a combination thereof.
 14. The method of claim 1, wherein the liquid lithium storage tank comprises a canister, wherein the canister comprises: a sidewall; a top surface; a bottom surface, wherein the sidewall, the top surface, and the bottom surface define an interior volume; an inlet port disposed through the top surface of the canister and operable to provide an inert gas to the interior volume of the canister; and the outlet port disposed through the top surface of the canister and operable to allow the liquid lithium to flow out of the canister.
 15. A method for flowing liquid lithium to a processing chamber, comprising: flowing liquid lithium from a lithium refill container through a liquid lithium supply line and to a liquid lithium delivery module, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container; and removing impurities from the flow of the liquid lithium flowing through the liquid lithium supply line via a first filter assembly positioned along the liquid lithium supply line; flowing the liquid lithium from the liquid lithium delivery module to the processing chamber; wherein the liquid lithium delivery module comprises: a lithium storage region operable to store liquid lithium, wherein the lithium storage region comprises a liquid lithium storage tank having an outlet port; a fluid supply line fluidly coupling the outlet port of the liquid lithium storage tank; a second filter assembly positioned along the fluid supply line operable to remove impurities from the flow of the liquid lithium flowing through the fluid supply line; a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line; a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the flow control region is positioned downstream from the flow meter; a fluid delivery line fluidly coupled downstream of the one or more valves and configured to be in fluid communication to the processing chamber; and a third filter assembly positioned along the fluid delivery line operable to remove impurities from the flow of the liquid lithium flowing through the fluid delivery line.
 16. The method of claim 15, further comprising removing contaminants from the liquid lithium with the second filter assembly comprising a metal mesh filter.
 17. The method of claim 15, further comprising removing contaminants from the liquid lithium with the third filter assembly comprising a metal mesh filter.
 18. The method of claim 15, wherein the first filter assembly comprises a metal mesh filter operable to remove contaminants from the liquid lithium.
 19. The method of claim 15, wherein the flow meter is an electromagnetic flow meter, and wherein the one or more valves comprises a regulator valve.
 20. A method for flowing liquid lithium to a processing chamber, comprising: flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container; and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber; wherein the liquid lithium delivery module comprises: a lithium storage region operable to store liquid lithium, wherein the lithium storage region comprises a liquid lithium storage tank having an outlet port; a fluid supply line fluidly coupling the outlet port of the liquid lithium storage tank; a filter assembly positioned along the fluid supply line operable to remove impurities from the flow of the liquid lithium flowing through the fluid supply line; a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line, wherein the flow meter is an electromagnetic flow meter or an ultrasonic flow meter; a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the flow control region is positioned downstream from the flow meter, and wherein the one or more valves comprises a regulator valve or a needle valve; and a fluid delivery line fluidly coupled downstream of the one or more valves and configured to be in fluid communication to the processing chamber. 